Experimental Analyses on Multiscale Structural and Mechanical Properties of ε-Si/GeSi/C-Si Materials

Experimental Analyses on Multiscale Structural and Mechanical Properties of ε-Si/GeSi/C-Si Materials

Strained silicon (ε-Si) is a promising material that could extend Moore’s law by enhancing electron mobility. A ε-Si material is usually composed of multiscale, multilayer heterostructures, where the strained-silicon film or strap is tens-of-nanometers thick, and its buff...

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Bibliographic Details
Main Authors: Wei Qiu, Lu-Lu Ma, Hong-Tao Wang, Ren-Rong Liang, Yu-Cheng Zhao, Yun-Shen Zhou
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Applied Sciences
Subjects:
strained silicon (ε-Si)
multiscale
structural property
mechanical property
micro-Raman spectroscopy
cross-section
dislocation
Online Access:https://www.mdpi.com/2076-3417/8/12/2333

Internet

https://www.mdpi.com/2076-3417/8/12/2333

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