Development of Pulsed TEM Equipped with Nitride Semiconductor Photocathode for High‐Speed Observation and Material Nanofabrication
The development of pulsed electron sources is applied to electron microscopes or electron beam lithography and is effective in expanding the functions of such devices. The laser photocathode can generate short pulsed electrons with high emittance, and the emittance can be increased by changing the c...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-02-01
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| Series: | Quantum Beam Science |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2412-382X/5/1/5 |