Patterning with Organized Molecules
Decades of progress in the semiconductor industry has led to lithographically printed dimensions that are small enough that the positions of individual molecules and the stochastic variation in the number of photons have a significant effect on the quality of photoresist patterns. These effects scal...
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| Format: | Article |
| Language: | English |
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JommPublish
2021-08-01
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| Series: | Journal of Microelectronic Manufacturing |
| Subjects: | |
| Online Access: | http://www.jommpublish.org/p/75/ |