Construction and testing of a hydrogen cracking cell
A UHV atomic hydrogen-cracking cell has been constructed to produce atomic hydrogen in order to perform in-situ cleaning of semiconductor samples. The cell was calibrated and tested with the objective of cleaning the III-V semiconductor samples such as GaAs. Mass spectroscopy studies during the atom...
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| Format: | Article |
| Language: | English |
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Isfahan University of Technology
2011-12-01
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| Series: | Iranian Journal of Physics Research |
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| Online Access: | http://ijpr.iut.ac.ir/browse.php?a_code=A-10-1-543&slc_lang=en&sid=1 |