Effect of the Sputtering Deposition Conditions on the Crystallinity of High-Temperature Annealed AlN Films

Face-to-face annealed sputter-deposited aluminum nitride (AlN) templates (FFA Sp-AlN) are a promising material for application in deep-ultraviolet light-emitting diodes (DUV-LEDs), whose performance is directly related to the crystallinity of the AlN film. However, the influence of the sputtering co...

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Bibliographic Details
Main Authors: Kenjiro Uesugi, Kanako Shojiki, Shiyu Xiao, Shigeyuki Kuboya, Hideto Miyake
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Coatings
Subjects:
AlN
Online Access:https://www.mdpi.com/2079-6412/11/8/956