Two-dimensional simulation of an Ar/H2 direct-current discharge plasma
We created a two-dimensional, mathematical fluid model of a plasma in a spherical direct-current (DC) glow-discharge chamber based on the finite-element method (FEM) using the commercial FEM solver COMSOL Multiphysics. The model is based on the Boltzmann transport equation, and we solved it to simul...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-05-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0049041 |