Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness

Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also tra...

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Bibliographic Details
Main Authors: Attilio Frangi, Andrea Guerrieri, Nicoló Boni
Format: Article
Language:English
Published: MDPI AG 2017-04-01
Series:Sensors
Subjects:
micromirrors
MOEMS
Mathieu equation
parametric resonance
continuation approach
arc length algorithm
material derivative
comb-fingers
electrostatic force and torque
electrostatic stiffness
Online Access:http://www.mdpi.com/1424-8220/17/4/779

Internet

http://www.mdpi.com/1424-8220/17/4/779

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