A highly pH-sensitive nanowire field-effect transistor based on silicon on insulator
Background: An experimental and theoretical study of a silicon-nanowire field-effect transistor made of silicon on insulator by CMOS-compatible methods is presented.Results: A maximum Nernstian sensitivity to pH change of 59 mV/pH was obtained experimentally. The maximum charge sensitivity of the se...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2013-05-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.4.38 |