Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Employing polymer cantilevers has shown to outperform using their silicon or silicon nitride analogues concerning the imaging speed of atomic force microscopy (AFM) in tapping mode (intermittent contact mode with amplitude modulation) by up to one order of magnitude. However, tips of the cantilever...

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Bibliographic Details
Main Authors: Nahid Hosseini, Matthias Neuenschwander, Oliver Peric, Santiago H. Andany, Jonathan D. Adams, Georg E. Fantner
Format: Article
Language:English
Published: Beilstein-Institut 2019-11-01
Series:Beilstein Journal of Nanotechnology
Subjects:
atomic force microscopy (afm)
durability
imaging speed
polymer cantilever
silicon nitride tip
Online Access:https://doi.org/10.3762/bjnano.10.226

Internet

https://doi.org/10.3762/bjnano.10.226

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