A Robust Miniature Silicon Microphone Diaphragm
A novel miniature silicon microphone diaphragm that is highly robust when subjected to residual stress is described. The novel diaphragm is composed of a reinforced plate supported on carefully designed hinges. An approximate model is developed to account for the effects of the small back volume be...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-10-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_85.pdf |