High-resolution nanopatterning of biodegradable polylactide by thermal nanoimprint lithography using gas permeable mold

We report high-resolution (150 nm) nanopatterning of biodegradable polylactide by thermal nanoimprint lithography using dichloromethane as a volatile solvent for improving the liquidity and a porous cyclodextrin-based gas-permeable mold. This study demonstrates the high-resolution patterning of poly...

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Bibliographic Details
Main Authors: Satoshi Takei, Makoto Hanabata
Format: Article
Language:English
Published: AIP Publishing LLC 2017-03-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4978448