Examination of smooth surfaces roughness using angle scatterometer. Part 1. The method of measurement. The measurement instrument

Examination of smooth surfaces roughness using angle scatterometer. Part 1. The method of measurement. The measurement instrument

The basic parameters of surface roughness are described in this article. The method of calculation of these parameters from measurement of BSDF function characterizing scatter from surface is shown. Automated angle scatterometer, built at the Institute of Optoelectronics of the Military University o...

Full description

Bibliographic Details
Main Author: Andrzej Pawlata
Format: Article
Language:English
Published: Wojskowa Akademia Techniczna, Redakcja Wydawnictw WAT, ul. gen. S. Kaliskiego 2, 00-908 Warszawa 2015-03-01
Series:Biuletyn Wojskowej Akademii Technicznej
Subjects:
surface roughness
scattering
BSDF function
scatterometer
Online Access:http://biuletynwat.pl/icid/1145426

Internet

http://biuletynwat.pl/icid/1145426

Similar Items