Experimental and numerical studies of microwave-plasma interaction in a MWPECVD reactor
This work deals with and proposes a simple and compact diagnostic method able to characterize the interaction between microwave and plasma without the necessity of using an external diagnostic tool. The interaction between 2.45 GHz microwave and plasma, in a typical ASTeX-type reactor, is investigat...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-12-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4971426 |