Resolution enhancement in scanning electron microscopy using deep learning
Abstract We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in low-resolution SEM images and comparing them with the...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2019-08-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-019-48444-2 |