Advanced RuO<sub>2</sub> Thin Films for pH Sensing Application

Advanced RuO<sub>2</sub> Thin Films for pH Sensing Application

RuO<sub>2</sub> thin films were prepared using magnetron sputtering under different deposition conditions, including direct current (DC) and radio frequency (RF) discharges, metallic/oxide cathodes, different substrate temperatures, pressures, and deposition times. The surface morphology...

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Bibliographic Details
Main Authors: Xinyue Yao, Mikko Vepsäläinen, Fabio Isa, Phil Martin, Paul Munroe, Avi Bendavid
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Sensors
Subjects:
ruthenium dioxide
magnetron sputtering conditions
thin film characterisation
pH performance
Online Access:https://www.mdpi.com/1424-8220/20/22/6432

Internet

https://www.mdpi.com/1424-8220/20/22/6432

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