Vibration-Assisted Roll-Type Polishing System Based on Compliant Micro-Motion Stage
This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employe...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-09-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/9/10/499 |