Flexible Helicoids, Atomic Force Microscopy (AFM) Cantilevers in High Mode Vibration, and Concave Notch Hinges in Precision Measurements and Research
Flexible structures are the main components in many precision measuring and research systems. They provide miniaturization, repeatability, minimal damping, low measuring forces, and very high resolution. This article focuses on the modeling, development, and comparison of three typical flexible micr...
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| Format: | Article |
| Language: | English |
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MDPI AG
2012-05-01
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| Series: | Micromachines |
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| Online Access: | http://www.mdpi.com/2072-666X/3/2/480 |