Flexible Helicoids, Atomic Force Microscopy (AFM) Cantilevers in High Mode Vibration, and Concave Notch Hinges in Precision Measurements and Research

Flexible structures are the main components in many precision measuring and research systems. They provide miniaturization, repeatability, minimal damping, low measuring forces, and very high resolution. This article focuses on the modeling, development, and comparison of three typical flexible micr...

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Bibliographic Details
Main Author: Yakov Tseytlin
Format: Article
Language:English
Published: MDPI AG 2012-05-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/3/2/480