Size Effect Impact on the Mechanical Behavior of an Electrically Actuated Polysilicon Nanobeam based NEMS Resonator

Size Effect Impact on the Mechanical Behavior of an Electrically Actuated Polysilicon Nanobeam based NEMS Resonator

In this paper, the dynamic response of resonating nano-beams is investigated using a strain gradient elasticity theory. A nonlinear model is obtained based on the Galerkin decomposition method to find the dynamic response of the investigated beam around its statically deflected position. The mid-pla...

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Bibliographic Details
Main Authors: Ehsan Maani Miandoab, Hossein Nejat Pishkenari, Aghil Yousefi-Koma, Farid Tajaddodianfar, Hassen Ouakad
Format: Article
Language:English
Published: Shahid Chamran University of Ahvaz 2017-06-01
Series:Journal of Applied and Computational Mechanics
Subjects:
NEMS
Nano-resonator
Strain gradient elasticity theory
Size effect
Online Access:http://jacm.scu.ac.ir/article_12741_81b6461684951f9bea3832deffb05955.pdf

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