Size Effect Impact on the Mechanical Behavior of an Electrically Actuated Polysilicon Nanobeam based NEMS Resonator
In this paper, the dynamic response of resonating nano-beams is investigated using a strain gradient elasticity theory. A nonlinear model is obtained based on the Galerkin decomposition method to find the dynamic response of the investigated beam around its statically deflected position. The mid-pla...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Shahid Chamran University of Ahvaz
2017-06-01
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| Series: | Journal of Applied and Computational Mechanics |
| Subjects: | |
| Online Access: | http://jacm.scu.ac.ir/article_12741_81b6461684951f9bea3832deffb05955.pdf |