THERMAL DRIFT CHARACTERISTICS OF CAPACITIVE PRESSURE SENSORS
The capacitive pressure sensors based on silicon are characterized by their very high sensitivities and their low power consumption. Nevertheless, their thermal behavior remains more or less unpredictable because they can indicate very high thermal coefficients. The study of the thermal behavior of...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor's University
2016-03-01
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| Series: | Journal of Engineering Science and Technology |
| Subjects: | |
| Online Access: | http://jestec.taylors.edu.my/Vol%2011%20issue%203%20March%202016/Volume%20(11)%20Issue%20(3)%20346-361.pdf |