A New Microhardness Testing Method on Grating Films
The manufacturing process of large-area, high-precision gratings is a very complicated and time-consuming process. The hardness testing of grating films is an important step in the entire process. In order to simplify the manufacturing process of gratings, we have proposed a new method for testing m...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2020-01-01
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| Series: | Mathematical Problems in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2020/6931978 |