Calibrating a high-speed contact-resonance profilometer

Calibrating a high-speed contact-resonance profilometer

<p>A European EMPIR project, which aims to use large-scale, 5 mm <span class="inline-formula">×</span> 200 <span class="inline-formula">µ</span>m <span class="inline-formula">×<...

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Bibliographic Details
Main Authors:	M. Fahrbach, S. Friedrich, B. Cappella, E. Peiner
Format:	Article
Language:	English
Published:	Copernicus Publications 2020-07-01
Series:	Journal of Sensors and Sensor Systems
Online Access:	https://jsss.copernicus.org/articles/9/179/2020/jsss-9-179-2020.pdf

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