Calibrating a high-speed contact-resonance profilometer
<p>A European EMPIR project, which aims to use large-scale, 5 mm <span class="inline-formula">×</span> 200 <span class="inline-formula">µ</span>m <span class="inline-formula">×<...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2020-07-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://jsss.copernicus.org/articles/9/179/2020/jsss-9-179-2020.pdf |