Nanoindentation dataset of silicon and hafnia doped silicon coatings produced by magnetron sputtering
Mechanical properties of three different coatings comprising of pure silicon, 36 mol% HfO2-doped silicon and 60 mol% HfO2-doped silicon on SiC substrate material were obtained by nanoindentation. The coatings aim at oxidation protective layers in environmental barrier coating systems for SiC/SiC cer...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-08-01
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| Series: | Data in Brief |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2352340920306946 |