Highly Conductive and Transparent AZO Films Fabricated by PLD as Source/Drain Electrodes for TFTs

Highly Conductive and Transparent AZO Films Fabricated by PLD as Source/Drain Electrodes for TFTs

Aluminum-doped ZnO (AZO) has huge prospects in the field of conductive electrodes, due to its low price, high transparency, and pro-environment. However, enhancing the conductivity of AZO and realizing ohmic contact between the semiconductor and AZO source/drain (S/D) electrodes without thermal anne...

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Bibliographic Details
Main Authors: Hongke Zhang, Xiaoqing Li, Zhiqiang Fang, Rihui Yao, Xiaochen Zhang, Yuxi Deng, Xubing Lu, Hong Tao, Honglong Ning, Junbiao Peng
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Materials
Subjects:
AZO
PLD
TFT
transparency
source/drain electrodes
Online Access:https://www.mdpi.com/1996-1944/11/12/2480

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https://www.mdpi.com/1996-1944/11/12/2480

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