A Miniature Resonant and Torsional Magnetometer Based on Lorentz Force

A microelectromechanical system (MEMS) torsional resonant magnetometer based on Lorentz force was investigated, consisting of torsional structures, torsional beams, metal plates, a coil, and a glass substrate. The Lorentz force, introduced by the interaction between the current in the MEMS coil and...

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Bibliographic Details
Main Authors: Lingqi Wu, Zheng Tian, Dahai Ren, Zheng You
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/9/12/666