ESTIMATE OF THE NONLINEARITY OF THE SELF-OSCILLATING ACCELEROMETER WITH THE PENDULUM SENSITIVE ELEMENT
The object of study is the design of the self-oscillating accelerometer, wherein the inertial mass, which is a sensitive element, is executed in the form of a pendulum. An option of implementation of such a sensor is proposed with the use of micromechanical technology. Nonlinearity of the characteri...
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| Format: | Article |
| Language: | English |
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CRI «Electronics»
2018-03-01
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| Series: | Радиопромышленность |
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| Online Access: | https://www.radioprom.org/jour/article/view/272 |