Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings

Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings

Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabricati...

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Bibliographic Details
Main Authors: Wei Zheng, Peng Li, Remko van den Hurk, Stephane Evoy
Format: Article
Language:English
Published: MDPI AG 2016-07-01
Series:Sensors
Subjects:
helium ion
milling
nanostrings
resonators
nanoelectromechanical systems
Online Access:http://www.mdpi.com/1424-8220/16/7/1080

Internet

http://www.mdpi.com/1424-8220/16/7/1080

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