Perturbation Stochastic Finite Element Analysis of Thermoelastic Quality Factor of Micro-Resonators
In the design of micro-electromechanical systems (MEMS) such as micro-resonators, one of the major dissipation phenomena to be considered is thermoelastic damping. The performance of such MEMS is directly related to their thermoelastic quality factor which has to be predicted accurately. Moreover, t...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-10-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_07/P_SI_18.pdf |