Simple fabrication of highly sensitive capacitive pressure sensors using a porous dielectric layer with cone-shaped patterns
This study aims to improve the sensitivity of sensors using porous structures and cone-shaped patterns in the composition of a capacitive pressure sensor. A simple and rapid fabrication method for the production of porous structures and cone-shaped patterns using microwave irradiation of emulsions c...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-01-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127520307383 |