Integrated structure for a resonant micro-gyroscope and accelerometer

Integrated structure for a resonant micro-gyroscope and accelerometer

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This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceler...

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Bibliographic Details
Main Authors: V. Zega, C. Comi, A. Corigliano, C. Valzasina
Format: Article
Language:English
Published: Gruppo Italiano Frattura 2014-07-01
Series:Frattura ed Integrità Strutturale
Subjects:
Resonators
Online Access:https://www.fracturae.com/index.php/fis/article/view/1265
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spelling doaj-5f2871818fc5450182294009389365c02021-01-27T17:17:37ZengGruppo Italiano FratturaFrattura ed Integrità Strutturale1971-89932014-07-01829Integrated structure for a resonant micro-gyroscope and accelerometerV. ZegaC. ComiA. CoriglianoC. Valzasina This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators. https://www.fracturae.com/index.php/fis/article/view/1265Resonators
collection DOAJ
language English
format Article
sources DOAJ
author V. Zega
C. Comi
A. Corigliano
C. Valzasina
spellingShingle V. Zega
C. Comi
A. Corigliano
C. Valzasina
Integrated structure for a resonant micro-gyroscope and accelerometer
Frattura ed Integrità Strutturale
Resonators
author_facet V. Zega
C. Comi
A. Corigliano
C. Valzasina
author_sort V. Zega
title Integrated structure for a resonant micro-gyroscope and accelerometer
title_short Integrated structure for a resonant micro-gyroscope and accelerometer
title_full Integrated structure for a resonant micro-gyroscope and accelerometer
title_fullStr Integrated structure for a resonant micro-gyroscope and accelerometer
title_full_unstemmed Integrated structure for a resonant micro-gyroscope and accelerometer
title_sort integrated structure for a resonant micro-gyroscope and accelerometer
publisher Gruppo Italiano Frattura
series Frattura ed Integrità Strutturale
issn 1971-8993
publishDate 2014-07-01
description This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators.
topic Resonators
url https://www.fracturae.com/index.php/fis/article/view/1265
work_keys_str_mv AT vzega integratedstructureforaresonantmicrogyroscopeandaccelerometer
AT ccomi integratedstructureforaresonantmicrogyroscopeandaccelerometer
AT acorigliano integratedstructureforaresonantmicrogyroscopeandaccelerometer
AT cvalzasina integratedstructureforaresonantmicrogyroscopeandaccelerometer
_version_ 1724320563577487360

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