Integrated structure for a resonant micro-gyroscope and accelerometer
This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceler...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Gruppo Italiano Frattura
2014-07-01
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| Series: | Frattura ed Integrità Strutturale |
| Subjects: | |
| Online Access: | https://www.fracturae.com/index.php/fis/article/view/1265 |