Design of a Novel MEMS Gyroscope Array
This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2013-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/13/2/1651 |