Micro-fabrication of ceramics: Additive manufacturing and conventional technologies
Abstract Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of a...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2021-01-01
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Series: | Journal of Advanced Ceramics |
Subjects: | |
Online Access: | https://doi.org/10.1007/s40145-020-0422-5 |