Plasma-Based Power Limitation for Highly Linear MEMS Switch Protection and Isolation Enhancement
A novel hybrid approach integrating a MEMS switch with a gas discharge tube plasma cell to enhance switch survivability and isolation, especially at high incident power levels, is demonstrated. The theory of operation is discussed including consideration of the underlying plasma phenomena as well as...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9199825/ |