Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma

Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma

The Langmuir probe is a feasible method to measure plasma parameters. However, as the reaction progresses in the discharged plasma, the contamination would be attached to the probe surface and lead to a higher incorrect electron temperature. Then, the electron density cannot be obtained. This paper...

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Main Authors: Chi Chen, Wenjie Fu, Chaoyang Zhang, Dun Lu, Meng Han, Yang Yan
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Applied Sciences
Subjects:
plasma diagnostics
Langmuir probe
optical emission spectrometry
electron temperature
electron density
Online Access:https://www.mdpi.com/2076-3417/10/22/8117
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spelling doaj-5dcc45c1a3f1410ba12425eddc69f3c82020-11-25T03:08:41ZengMDPI AGApplied Sciences2076-34172020-11-01108117811710.3390/app10228117Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave PlasmaChi Chen0Wenjie Fu1Chaoyang Zhang2Dun Lu3Meng Han4Yang Yan5School of Electronic Science and Engineering and Terahertz Science and Technology Key Laboratory of Sichuan Province, University of Electronic Science and Technology of China, Chengdu 610054, ChinaSchool of Electronic Science and Engineering and Terahertz Science and Technology Key Laboratory of Sichuan Province, University of Electronic Science and Technology of China, Chengdu 610054, ChinaSchool of Electronic Science and Engineering and Terahertz Science and Technology Key Laboratory of Sichuan Province, University of Electronic Science and Technology of China, Chengdu 610054, ChinaSchool of Electronic Science and Engineering and Terahertz Science and Technology Key Laboratory of Sichuan Province, University of Electronic Science and Technology of China, Chengdu 610054, ChinaSchool of Electronic Science and Engineering and Terahertz Science and Technology Key Laboratory of Sichuan Province, University of Electronic Science and Technology of China, Chengdu 610054, ChinaSchool of Electronic Science and Engineering and Terahertz Science and Technology Key Laboratory of Sichuan Province, University of Electronic Science and Technology of China, Chengdu 610054, ChinaThe Langmuir probe is a feasible method to measure plasma parameters. However, as the reaction progresses in the discharged plasma, the contamination would be attached to the probe surface and lead to a higher incorrect electron temperature. Then, the electron density cannot be obtained. This paper reports a simple approach to combining the Langmuir probe and the optical emission spectrometry (OES), which can be used to obtain the electron temperature to solve this problem. Even the Langmuir probe is contaminative, the probe current–voltage (I–V) curve with the OES spectra also gives the approximate electron temperature and density. A homemade coaxial line microwave plasma source driven by a 2.45 GHz magnetron was adopted to verify this mothed, and the electron temperature and density in different pressure (40–80 Pa) and microwave power (400–800 W) were measured to verify that it is feasible.https://www.mdpi.com/2076-3417/10/22/8117plasma diagnosticsLangmuir probeoptical emission spectrometryelectron temperatureelectron density
collection DOAJ
language English
format Article
sources DOAJ
author Chi Chen
Wenjie Fu
Chaoyang Zhang
Dun Lu
Meng Han
Yang Yan
spellingShingle Chi Chen
Wenjie Fu
Chaoyang Zhang
Dun Lu
Meng Han
Yang Yan
Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma
Applied Sciences
plasma diagnostics
Langmuir probe
optical emission spectrometry
electron temperature
electron density
author_facet Chi Chen
Wenjie Fu
Chaoyang Zhang
Dun Lu
Meng Han
Yang Yan
author_sort Chi Chen
title Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma
title_short Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma
title_full Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma
title_fullStr Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma
title_full_unstemmed Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma
title_sort langmuir probe diagnostics with optical emission spectrometry (oes) for coaxial line microwave plasma
publisher MDPI AG
series Applied Sciences
issn 2076-3417
publishDate 2020-11-01
description The Langmuir probe is a feasible method to measure plasma parameters. However, as the reaction progresses in the discharged plasma, the contamination would be attached to the probe surface and lead to a higher incorrect electron temperature. Then, the electron density cannot be obtained. This paper reports a simple approach to combining the Langmuir probe and the optical emission spectrometry (OES), which can be used to obtain the electron temperature to solve this problem. Even the Langmuir probe is contaminative, the probe current–voltage (I–V) curve with the OES spectra also gives the approximate electron temperature and density. A homemade coaxial line microwave plasma source driven by a 2.45 GHz magnetron was adopted to verify this mothed, and the electron temperature and density in different pressure (40–80 Pa) and microwave power (400–800 W) were measured to verify that it is feasible.
topic plasma diagnostics
Langmuir probe
optical emission spectrometry
electron temperature
electron density
url https://www.mdpi.com/2076-3417/10/22/8117
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