Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma

Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma

The Langmuir probe is a feasible method to measure plasma parameters. However, as the reaction progresses in the discharged plasma, the contamination would be attached to the probe surface and lead to a higher incorrect electron temperature. Then, the electron density cannot be obtained. This paper...

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Bibliographic Details
Main Authors: Chi Chen, Wenjie Fu, Chaoyang Zhang, Dun Lu, Meng Han, Yang Yan
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Applied Sciences
Subjects:
plasma diagnostics
Langmuir probe
optical emission spectrometry
electron temperature
electron density
Online Access:https://www.mdpi.com/2076-3417/10/22/8117

Internet

https://www.mdpi.com/2076-3417/10/22/8117

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