An Improved Phase-Robust Configuration for Vibration Amplitude-Phase Extraction for Capacitive MEMS Gyroscopes

An Improved Phase-Robust Configuration for Vibration Amplitude-Phase Extraction for Capacitive MEMS Gyroscopes

This paper presents for the first time an improved algorithm for vibration amplitude-phase information extraction of capacitive microelectromechanical systems (MEMS) gyroscopes. Amplitude and phase information resulting from the improved algorithm is insensitive to the phase variation of an interfac...

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Bibliographic Details
Main Authors: Xudong Zheng, Siqi Liu, Yiyu Lin, Haibin Wu, Lai Teng, Zhonghe Jin
Format: Article
Language:English
Published: MDPI AG 2018-07-01
Series:Micromachines
Subjects:
microelectromechanical systems (MEMS) gyroscopes
phase delay variation
amplitude extraction
phase extraction
bias instability
quadrature error
long-time drift
Online Access:http://www.mdpi.com/2072-666X/9/7/362

Internet

http://www.mdpi.com/2072-666X/9/7/362

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