Simple Non-Destructive Method of Ultrathin Film Material Properties and Generated Internal Stress Determination Using Microcantilevers Immersed in Air

Simple Non-Destructive Method of Ultrathin Film Material Properties and Generated Internal Stress Determination Using Microcantilevers Immersed in Air

Recent progress in nanotechnology has enabled to design the advanced functional micro-/nanostructures utilizing the unique properties of ultrathin films. To ensure these structures can reach the expected functionality, it is necessary to know the density, generated internal stress and the material p...

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Bibliographic Details
Main Authors: Ivo Stachiv, Lifeng Gan
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Coatings
Subjects:
thin film
atomic layer deposition
nanomechanics
Young’s modulus
shear modulus
resonant frequency
<i>Q</i>-factor
microcantilevers
internal stress
Online Access:https://www.mdpi.com/2079-6412/9/8/486

Internet

https://www.mdpi.com/2079-6412/9/8/486

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