A Tunable Strain Sensor Using Nanogranular Metals

A Tunable Strain Sensor Using Nanogranular Metals

This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID...

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Bibliographic Details
Main Authors: Friedemann Völklein, Alexander Kaya, Jens Müller, Pintu Das, Heiko Reith, Fabrizio Porrati, Roland Sachser, Markus Baranowski, Christina Grimm, Christian H. Schwalb, Michael Huth
Format: Article
Language:English
Published: MDPI AG 2010-11-01
Series:Sensors
Subjects:
cantilevers
electron beam induced deposition
granular metals
strain sensors
Online Access:http://www.mdpi.com/1424-8220/10/11/9847/

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http://www.mdpi.com/1424-8220/10/11/9847/

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