Effects of Thermal Annealing on the Properties of Zirconium-Doped Mg<sub>x</sub>Zn<sub>1−X</sub>O Films Obtained through Radio-Frequency Magnetron Sputtering
Zirconium-doped Mg<sub>x</sub>Zn<sub>1−x</sub>O (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-05-01
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| Series: | Membranes |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2077-0375/11/5/373 |