Characteristics of MOCVD-Grown High-Quality CdTe Layers on GaAs Substrates

CdTe epitaxial layers are grown successfully on a (100)-GaAs substrate by metalorganic chemical vapor deposition (MOCVD) using dimethylcadrnium (DMCd) and diethyltelluride (DETe) as alkyl sources. The CdTe epilayers grown between 365°C and 380°C possess the best surface morphology. DETe is used as t...

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Bibliographic Details
Main Authors: P. W. Sze, K. F. Yarn, Y. H. Wang, M. P. Houng, G. L. Chen
Format: Article
Language:English
Published: Hindawi Limited 1995-01-01
Series:Active and Passive Electronic Components
Online Access:http://dx.doi.org/10.1155/1995/16596