Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers

Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers

We present a wafer-level vacuum-packaged (WLVP) translatory micro-electro-mechanical system (MEMS) actuator developed for a compact near-infrared-Fourier transform spectrometer (NIR-FTS) with 800–2500 nm spectral bandwidth and signal-nose-ratio (SNR) > 1000 in the smaller bandwidth range (1200–25...

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Bibliographic Details
Main Authors: Thilo Sandner, Eric Gaumont, Thomas Graßhoff, Andreas Rieck, Tobias Seifert, Gerald Auböck, Jan Grahmann
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Micromachines
Subjects:
micro-opto-electro-mechanical system (MOEMS)
translatory micro mirror
optical wafer-level vacuum package (WLVP)
NIR Fourier-transform spectrometer
glass-frit wafer bonding
Online Access:https://www.mdpi.com/2072-666X/11/10/883

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https://www.mdpi.com/2072-666X/11/10/883

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