Screen-Printed Microcantilevers for Environmental Sensing
This work investigates different geometries for fully screen-printed self-actuated self-readout microcantilevers made using a sacrificial layer process. The microcantilevers are made of PZT sandwiched between two gold electrodes. Q-factors as high as 1300 are reported. Promising theoretical sensitiv...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-07-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/722 |