FUNDAMENTAL STUDY OF MAGNETICALLY LEVITATED CONTACT-FREE MICRO-BEARING FOR MEMS APPLICATIONS
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Exeley Inc.
2010-09-01
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| Series: | International Journal on Smart Sensing and Intelligent Systems |
| Subjects: | |
| Online Access: | https://www.exeley.com/exeley/journals/in_jour_smart_sensing_and_intelligent_systems/3/3/pdf/10.21307_ijssis-2017-407.pdf |