Development of the contact detection method in free-form surface of the optical fiber probe for microstructure measurement using long short term memory

We have been developing a measurement system for microstructures using a small-diameter optical fiber probe. The contact detection method using a threshold value may cause a large error due to the time lag between the real contact time and the time detected by the measurement system. In this paper,...

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Bibliographic Details
Main Authors: Hiroshi Murakami, Akio Katsuki, Takao Sajima, Kosuke Uchiyama, Yudai Sata
Format: Article
Language:English
Published: Elsevier 2021-12-01
Series:Measurement: Sensors
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2665917421001331