A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

Due to their unique electromagnetic properties, meta-atom arrays have always been a hotspot to realize all kinds of particular functions, and the research on meta-atom structure has extended from two-dimensions (2D) to three-dimensions (3D) in recent years. With the continuous pursuit of complex 3D...

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Bibliographic Details
Main Authors: Xiaoyu Chen, Yuyu Xia, Yifei Mao, Yun Huang, Jia Zhu, Jun Xu, Rui Zhu, Lei Shi, Wengang Wu
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Micromachines
Subjects:
fib-sid
3d nanofabrication
3d meta-atom array
cl imaging
ftir spectroscopy
Online Access:https://www.mdpi.com/2072-666X/11/1/95

Internet

https://www.mdpi.com/2072-666X/11/1/95

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