Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics

Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics

This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant optical losses throughout the motion range and is...

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Bibliographic Details
Main Authors: Jonathan Briere, Mohannad Y. Elsayed, Menouer Saidani, Martin Bérard, Philippe-Olivier Beaulieu, Hadi Rabbani-Haghighi, Frederic Nabki, Michaël Ménard
Format: Article
Language:English
Published: MDPI AG 2017-12-01
Series:Micromachines
Subjects:
microelectromechanical systems (MEMS)
electrostatic actuator
latch
micro-opto-electro-mechanical systems (MOEMS)
micro-platform
optical switch
scanning
integrated optics
silicon-on-insulator (SOI) MEMS
optical waveguide
Online Access:https://www.mdpi.com/2072-666X/8/12/354

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https://www.mdpi.com/2072-666X/8/12/354

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