Theoretical and Experimental Studies of Over-Polishing of Silicon Carbide in Annular Polishing

Theoretical and Experimental Studies of Over-Polishing of Silicon Carbide in Annular Polishing

Annular polishing technology is an important optical machining method for achieving a high-precision mirror surface on silicon carbide. However, the inevitable over-polishing of the specimen edge in annular polishing deteriorates achieved surface quality. In the present work, we first analytically i...

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Bibliographic Details
Main Authors: Junjie Zhang, La Han, Haiying Liu, Yikai Shi, Yongda Yan, Tao Sun
Format: Article
Language:English
Published: MDPI AG 2018-04-01
Series:Machines
Subjects:
silicon carbide
annular polishing
material removal
over-polishing
finite element
Online Access:http://www.mdpi.com/2075-1702/6/2/15

Internet

http://www.mdpi.com/2075-1702/6/2/15

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